Patent · US Expired

Method and device for treating and/or coating a surface of an object

US6875468B2 · kind B2 · utility

28Cited by

4References

27Claims

0Family size

Assignee

RWE Solar GmbH · DE

Inventors

Thomas Kunz · Pittsburgh, US
Hilmar Von Campe · Bad Homburg vor der Höhe, DE

Key dates

Filing date	Apr 2, 2002
Grant date	Apr 5, 2005
Priority date	—
Expiry date	Dec 28, 2022

Classification

Technology area (CPC Y)Emerging Cross-Sectional Technologies
CPC primaryY02P70/50
WIPO fieldSurface technology, coating
WIPO sectorChemistry

Abstract

Method for treating and/or coating a surface of an object, especially for coating a surface of a substrate such as a semiconductor component or solar cell, in which the surface is supplied with a gas that contains particles that will interact and/or react with the surface, forming a coating thereon. The surface of the object is oriented at an angle α from the vertical, and the gas is directed toward the surface such that it flows along the object by force of convection, starting from the base area of the surface of the object.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.