Device for detecting the angle of incidence of radiation on a radiation incidence surface

US6875974B2 · kind B2 · utility

Assignee

• ELMOS SEMICONDUCTOR SE · DE

Inventors

• Erhard Muesch · Werne, DE
• Wolfram Budde · Castrop-Rauxel, DE

Key dates

• Filing date: Apr 23, 2003
• Grant date: Apr 5, 2005
• Expiry date: Oct 2, 2023

Classification

• Technology area (CPC G): Physics
• CPC primary: G01S3/784
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A device for detecting the angle of incidence of radiation on a radiation incidence surface (14) comprises at last two first pairs (36) of photodiodes comprising first photodiodes (30) arranged along a first axis (12) and connected in series in a pair-wise manner. Each of the first photodiodes (30) comprises a space-charge zone (32) having a space-charge zone face (34) oriented towards the radiation incidence face (14). Further, the device is provided with a a shading mask (46) arranged at a distance (44) above the space-charge zone faces (34) of the first photodiodes (30) and comprising radiation-transmitting areas (48). Each radiation-transmitting area (48) is assigned to the space-charge zone faces (34) of the two first photodiodes (30) of a first pair (36) of photodiodes. When viewed in the direction of the normal of the radiation incidence face (14), the degree of overlapping between a radiation-transmitting area (48) and its assigned space-charge zone faces (34) in the direction of the first axis (12) is different for at least two of the first pairs (36) of photodiodes. The device also comprises an evaluation unit (56) for monitoring the photocurrent and/or the photovoltage o…