Method and system for securing and controlling an electro-statically driven micro-mirror
US6876124B1 · kind B1 · utility
4Cited by
5References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 6, 2001 |
| Grant date | Apr 5, 2005 |
| Priority date | — |
| Expiry date | Jul 4, 2022 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B6/3584
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An electrically actuated micro-mirror system is disclosed. The system has at least three supporting springs attached to a micro-mirror providing at least two rotational degrees of freedom thereof. At least two optional enhancement springs are fanned out from an associated supporting spring to secure the micro-mirror, and the micro-mirror is electro-statically actuated to rotate while the supporting springs and the enhancement springs operate primarily in a tensile mode.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.