Method of treating DLC on substrate with oxygen and/or hot water
US6878405B2 · kind B2 · utility
6Cited by
17References
41Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 21, 2003 |
| Grant date | Apr 12, 2005 |
| Priority date | — |
| Expiry date | May 5, 2023 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/30
- WIPO fieldMaterials, metallurgy
- WIPO sectorChemistry
Abstract
A method is provided for treating diamond-like carbon (DLC) with a hot liquid and/or ion beam. This treatment can reduce the contact angle of the coating. In certain example embodiments, at least oxygen gas is used in an ion beam source(s) that generates the ion beam(s) used for the ion beam treatment.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.