Chemically-amplified resist compositions
US6878504B2 · kind B2 · utility
0Cited by
8References
18Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 28, 2003 |
| Grant date | Apr 12, 2005 |
| Priority date | — |
| Expiry date | May 28, 2023 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S430/111
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A chemically-amplified resist composition is disclosed, which comprises a polymer of formula (I) below:
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.