Structure having recesses and projections, method of manufacturing structure, and functional device
US6878634B2 · kind B2 · utility
6Cited by
21References
16Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 26, 2003 |
| Grant date | Apr 12, 2005 |
| Priority date | — |
| Expiry date | Jun 25, 2023 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/0017
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
A structure having recesses and projections is provided. A method of manufacturing the structure comprises the steps of preparing a first substrate having a projection, forming a first layer on the projection, transferring the first layer to a second substrate, and forming a recessed/projected surface structure in the second substrate by using the first layer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.