Semitransparent optical detector including a polycrystalline layer and method of making

US6879014B2 · kind B2 · utility

Assignee

• Aegis Semiconductor, Inc. · US

Inventors

• Sigurd Wagner · Princeton, US
• Matthias Wagner · Cambridge, US
• Eugene Yi-Shan Ma · Newton, US
• Adam Payne · Franklin, US

Key dates

• Filing date: Mar 20, 2001
• Grant date: Apr 12, 2005
• Expiry date: May 28, 2022

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y02P70/50
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

Materials suitable for fabricating optical monitors include amorphous, polycrystalline and microcrystalline materials. Semitransparent photodetector materials may be based on silicon or silicon and germanium alloys. Conductors for connecting to and contacting the photodetector may be made from various transparent oxides, including zinc oxide, tin oxide and indium tin oxide. Optical monitor structures based on PIN diodes take advantage of the materials disclosed. Various contact, lineout, substrate and interconnect structures optimize the monitors for integration with various light sources, including vertical cavity surface emitting laser (VCSEL) arrays. Complete integrated structures include a light source, optical monitor and either a package or waveguide into which light is directed.