Method and device for simultaneously determining the adhesion, friction, and other material properties of a sample surface

US6880386B1 · kind B1 · utility

Assignee

• Witec Wissenschaftliche Instrumente und Technologie GmbH · DE

Inventors

• Hans-Ulrich Krotil · Neu-Ulm, DE
• Thomas Stifter · Trier, DE
• Othmar Marti · Ulm, DE

Key dates

• Filing date: Jan 4, 2000
• Grant date: Apr 19, 2005
• Expiry date: Jan 4, 2020

Classification

• Technology area (CPC G): Physics
• CPC primary: G01Q60/28
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A process for the location-resolved simultaneous detection of the adhesion and friction as well as possibly of other material properties of a sample surface to be examined by means of a raster probe microscope comprising a raster probe. The raster probe and/or the sample with sample surface are moved until at a point of the sample surface to be examined the raster probe interacts in a determined manner with this surface. The raster probe and/or the sample are subjected to a vertical oscillation, and a first measuring signal characterized by the deformation of the raster probe is recorded. A second measuring signal characterizing the deformation of the raster probe is recorded, wherein the raster probe and/or the sample are subjected to a horizontal and/or vertical oscillation. From these two measuring signals the desired material properties are determined. For the detection of the entire surface area to be examined the raster probe and or the sample are again moved and for the repetition of the measuring process described brought into contact with the sample surface in the above described manner.