Fixing member for evaporation apparatus
US6881271B2 · kind B2 · utility
79Cited by
10References
5Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 4, 2004 |
| Grant date | Apr 19, 2005 |
| Priority date | — |
| Expiry date | May 4, 2024 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T117/10
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
An electric heater is placed so as to cover an upper opening of a crucible. Then, a plurality of angle members are disposed along the side portions of the electric heater and are pressed and fixed by clamps. The clamp includes, at its bottom, a curved portion formed by bending a plate-like spring member into a convex shape, and generates pressing force between the curved portion and corresponding claw portions at the upper edge, thereby clamping the crucible.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.