Synthesis of layers, coatings or films using templates
US6881647B2 · kind B2 · utility
37Cited by
26References
30Claims
0Family size
Assignee
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Key dates
| Filing date | Sep 20, 2001 |
| Grant date | Apr 19, 2005 |
| Priority date | — |
| Expiry date | May 3, 2022 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02E10/541
Abstract
Systems and methods are described for synthesis of films, coatings or layers using templates. A method includes locating a template within at least one of a first precursor layer that is coupled to a first substrate and a second precursor layer that is coupled to a second substrate; forming a composition layer; and moving the first substrate relative to the second substrate, wherein the composition layer remains coupled to the second substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.