Patent · US Expired

Semiconductor device with analog capacitor and method of fabricating the same

US6881999B2 · kind B2 · utility

18Cited by
4References
23Claims
0Family size

Assignee

Inventors

Key dates

Filing dateMar 20, 2003
Grant dateApr 19, 2005
Priority date
Expiry dateMar 20, 2023

Classification

  • Technology area (CPC Y)Emerging Cross-Sectional Technologies
  • CPC primaryY10S438/957
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

A semiconductor device having an analog capacitor and a method of fabricating the same are disclosed. The semiconductor device includes a bottom plate electrode disposed at a predetermined region of a semiconductor substrate, and an upper plate electrode having a region overlapped with the bottom plate electrode thereon. The upper plate electrode and the bottom plate electrode are formed of a metal compound. A capacitor dielectric layer is interposed between the bottom plate electrode and the upper plate electrode. A bottom electrode plug and an upper electrode plug are connected to the bottom plate electrode and the upper plate electrode through the interlayer dielectric layer.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.