Miniature device with bossed suspension member
US6882083B2 · kind B2 · utility
3Cited by
6References
18Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 14, 2002 |
| Grant date | Apr 19, 2005 |
| Priority date | — |
| Expiry date | Apr 30, 2022 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH02N1/008
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A miniature device comprising a substrate, a movable member overlying the substrate and first and second spaced-apart suspension members. Each of the first and second suspension members has a first bendable end portion coupled to the substrate and a second bendable end portion coupled to the movable member and a substantially rigid central portion. The first and second end portions of each suspension member have respective first and second lengths and the suspension member has an overall length. The sum of the first and second lengths of each suspension member ranges from 5% to 40% of the overall length of the suspension member.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.