Frequency transform phase shifting interferometry
US6882432B2 · kind B2 · utility
140Cited by
4References
34Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jul 31, 2001 |
| Grant date | Apr 19, 2005 |
| Priority date | — |
| Expiry date | Jul 31, 2021 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B2290/70
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The invention features methods and systems in which wavelength-tune PSI data is analyzed in the frequency domain to produce spectrally separated frequency peaks each corresponding to a particular pair of surfaces in an interferometric cavity defined by multiple pairs of surfaces. Each frequency peak provides optical path length information about a corresponding pair of surfaces in the cavity. As a result, the interferometric data from such cavities provides simultaneous information about multiple surfaces.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.