Interferometer system of compact configuration
US6882433B2 · kind B2 · utility
6Cited by
18References
22Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 30, 2003 |
| Grant date | Apr 19, 2005 |
| Priority date | — |
| Expiry date | Jun 30, 2023 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B9/02054
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An expanding measuring beam is inserted into a cavity of a frequency-scanning interferometer. The expanding measuring beam encounters non-specular (diffuse) reference and object surfaces so that the reflected light can be imaged with an imaging system of reduced dimension. The compact interferometer is adaptable to a variety of applications. For example, the compact interferometer can be incorporated into a sensor of a multi-stage measuring instrument or into a handheld imager.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.