Resonant scanner with asymmetric mass distribution
US6882462B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 22, 2003 |
| Grant date | Apr 19, 2005 |
| Priority date | — |
| Expiry date | Aug 22, 2023 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B26/105
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A micro-electromechanical system (MEMS) scanner may be used in a range of systems including a scanned beam display or a scanned beam image capture system. The MEMS scanner may include provision for movement or oscillation in two or more axes. A mass asymmetry is introduced to the scanner. The mass asymmetry induces an oscillation component in an axis orthogonal to a primary axis of movement. The asymmetric mass may be formed by a number of means including selective application and selective removal. In some applications, the mass may be selectively formed or removed in an array of locations. The frequency, phase, and direction of induced oscillation component may be selected.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.