Piezoelectric element, liquid jetting head, and method for manufacturing thereof
US6883901B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 22, 2003 |
| Grant date | Apr 26, 2005 |
| Priority date | — |
| Expiry date | May 1, 2023 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49155
- WIPO fieldTextile and paper machines
- WIPO sectorMechanical engineering
Abstract
The present invention provides a piezoelectric element having consistently high piezoelectric characteristics, and a method for manufacturing a liquid jetting head in which this element is used, by obtaining a degree of orientation that is suitable for a piezoelectric thin film, stably and with good reproducibility. A Ti film is formed on a layered bottom electrode 42, piezoelectric material layers constituting a piezoelectric thin film 43 is formed a plurality of cycles of layer formation, and a top electrode 44 is formed on the piezoelectric thin film 43 to produce a piezoelectric element 40. When the piezoelectric material layers are formed, the annealing temperature of the first cycle of layer formation is set higher than the annealing temperature of the other cycles of layer formation. In addition, the annealing time of the first cycle of layer formation is made longer than the annealing time of the other cycles of layer formation. The degree of orientation in the 100 plane is thereby increased, and the bottom electrode can be prevented from undergoing oxidation or Pd diffusion.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.