Flextensional transducer and method of forming flextensional transducer
US6883903B2 · kind B2 · utility
6Cited by
18References
22Claims
0Family size
Inventors
Key dates
| Filing date | Jan 21, 2003 |
| Grant date | Apr 26, 2005 |
| Priority date | — |
| Expiry date | Mar 8, 2023 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49401
- WIPO fieldTextile and paper machines
- WIPO sectorMechanical engineering
Abstract
A method of forming an opening through a substrate having a first side and a second side opposite the first side includes forming a trench in the first side of the substrate, forming a mask layer within the trench, filling the trench with a fill material, forming a first portion of the opening in the substrate from the second side of the substrate toward the mask layer, and forming a second portion of the opening in the substrate through the mask layer and the fill material, including communicating the second portion of the opening with the first portion of the opening and the first side of the substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.