Method of cleaning a probe
US6884300B2 · kind B2 · utility
18Cited by
5References
4Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 19, 2002 |
| Grant date | Apr 26, 2005 |
| Priority date | — |
| Expiry date | May 22, 2023 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/249991
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A cleaning sheet has a base sheet, a first polishing layer formed on the base sheet, a porous foamed layer having air bubbles inside formed on the base sheet, and a second polishing layer formed on the foamed layer. The surface of the foamed layer may be flat or preferably porous with the second polishing layer having openings corresponding to those on the porous surface of the foamed layer. For cleaning a probe by using such a cleaning sheet, the tip of the probe is caused to penetrate the surface of the second polishing layer, to pass through the foamed layer and to be pressed against the first polishing layer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.