Sensor for monitoring material deposition and method of monitoring material deposition
US6884458B2 · kind B2 · utility
2Cited by
1References
18Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Dec 4, 2002 |
| Grant date | Apr 26, 2005 |
| Priority date | — |
| Expiry date | Dec 4, 2022 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB05D1/62
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A material deposition sensor includes a heater and a temperature sensor separated from one another. In operation, the sensor is disposed within a deposition chamber, and material is deposited onto the sensor. When a particular material thickness is deposited, a direct thermally conductive path is created between the heater and temperature sensor, and heat from the heater conducts directly to the temperature sensor. By predetermining a deposition thickness necessary to create the direct thermally conductive path, the deposition thickness can be controlled and/or predicted.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.