Methods for creating optical structures in dielectrics using controlled energy deposition
US6884960B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 21, 2001 |
| Grant date | Apr 26, 2005 |
| Priority date | — |
| Expiry date | Oct 10, 2021 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B2006/12171
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
The present invention relates to a method for writing an optical structure within a workpiece of a dielectric material using FLDM. In a first embodiment system parameters for the FLDM are determined in dependence upon the dielectric material, a predetermined volume element and a predetermined change of the refractive index of the dielectric material within the predetermined volume element. The system parameters are determined such that self-focusing of a pulsed femtosecond laser beam is inhibted by non-linear absorption of the energy of the pulsed femtosecond laser beam within the dielectric material. A pulsed femtosecond laser beam based on the determined system parameters is focused at a predetermined location within the workpiece for inducing a change of the refractive index through dielectric modification within the predetermined volume element, the volume element including the focus. Various embodiments enable writing of various different optical structures into a workpiece.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.