Method and apparatus for automatic focusing of an optical device
US6884980B2 · kind B2 · utility
9Cited by
9References
29Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Feb 13, 2002 |
| Grant date | Apr 26, 2005 |
| Priority date | — |
| Expiry date | Dec 6, 2022 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B21/22
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
The invention concerns a method and an apparatus for automatically focusing an optical device onto a specific and predetermined region of a specimen. The apparatus compares signals corresponding to the vertical distance between a principal objective and a region of a specimen which is in focus to the vertical distance between the principal objective and a target region on the specimen. If the comparison of the distances indicates that they are not the same, the system automatically alters the distance between the specimen and the principal objective so that the target region is properly focused.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.