Display assembly having flexible transistors on a flexible substrate
US6885032B2 · kind B2 · utility
36Cited by
27References
49Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 20, 2002 |
| Grant date | Apr 26, 2005 |
| Priority date | — |
| Expiry date | Nov 20, 2022 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02F1/1368
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A thin film transistor array fabricated on a polyimide substrate forms a backplane for an electronic display. The thin film transistor array incorporates gate electrodes, a gate insulating layer, semiconducting channel layers deposited on top of the gate insulating layer, a source electrode, a drain electrode and a contact layer beneath each of the source and drain electrodes and in contact with at least the channel layer. An insulating encapsulation layer is positioned on the channel layer. The layers are deposited onto the polyimide substrate using PECVD and etched using photolithography to form the backplane.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.