Sensor with amorphous electrode
US6886403B2 · kind B2 · utility
18Cited by
21References
21Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 17, 2003 |
| Grant date | May 3, 2005 |
| Priority date | — |
| Expiry date | Jun 17, 2023 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01F23/363
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Disclosed herein are sensors, and method for making an using the same. In one embodiment, the sensor comprises: a first electrode disposed on a ceramic substrate, wherein the first electrode comprises an amorphous metal material comprising a first metal selected from the group consisting of a Group 9 metal, a Group 10 metal, a Group 11 metal, and combinations comprising at least one of the foregoing first metals, and zirconium or at least one of phosphorus and boron.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.