Gas supply unit
US6886599B2 · kind B2 · utility
7Cited by
5References
25Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 29, 2002 |
| Grant date | May 3, 2005 |
| Priority date | — |
| Expiry date | Sep 24, 2023 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T137/87885
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
A gas supply unit includes a base member, two or more fluid control devices, and a plurality of passage blocks attached to an upper surface of the base member and lower surfaces of the fluid control devices to connect the fluid control devices in fluid communication. One of the passage blocks is provided with an inlet port and an outlet port, a filter cavity sealingly formed between the inlet port and the outlet port, and a filter built-in the filter cavity.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.