Patent · US Expired

Patterning solution deposited thin films with self-assembled monolayers

US6887332B1 · kind B1 · utility

69Cited by
7References
9Claims
0Family size

Assignee

Inventors

Key dates

Filing dateApr 21, 2000
Grant dateMay 3, 2005
Priority date
Expiry dateApr 21, 2020

Classification

  • Technology area (CPC Y)Emerging Cross-Sectional Technologies
  • CPC primaryY10S428/914
  • WIPO fieldOptics
  • WIPO sectorInstruments

Abstract

The present invention provides a method of forming a patterned thin film on a surface of a substrate having thereon a patterned underlayer of a self-assembled monolayer. The method comprises depositing a thin film material on the self-assembled monolayer to produce a patterned thin film on the surface of the substrate. The present invention further provides processes for preparing the self-assembled monolayer. The present invention still further provides solution-based deposition processes, such as spin-coating and immersion-coating, to deposit a thin film material on the self-assembled monolayer to produce a patterned thin film on the surface of the substrate.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.