Apparatus and method for encapsulating an OLED formed on a flexible substrate
US6888172B2 · kind B2 · utility
18Cited by
11References
11Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Apr 11, 2003 |
| Grant date | May 3, 2005 |
| Priority date | — |
| Expiry date | Apr 11, 2023 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10K2102/311
Abstract
An apparatus and method are disclosed for encapsulating an OLED device formed on a flexible substrate. The OLED device is moisture protected by an encapsulation which sandwiches the OLED device between two transparent dielectric metal oxide layers. The oxide layers are formed in a chamber which includes a plurality of processing stations for forming successive atomic layers of oxides along passes of the flexible substrate within the chamber.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.