Sensing of mirror position in an optical switch
US6888470B2 · kind B2 · utility
2Cited by
9References
22Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Sep 30, 2002 |
| Grant date | May 3, 2005 |
| Priority date | — |
| Expiry date | Nov 12, 2022 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B6/359
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A MEMS device employed in an optical switch has a position sensor configured to determine mirror orientation in the device. The position sensor includes at least one light sensor located under an etch gap defining the mirror in the switch. Change of light intensity at each light sensor due to the change in separation corresponding to the etch gap during mirror motion is measured and related to the mirror deflection angle. Information about the angle may be used to provide feedback to the motion actuator, which then may be operated to orient the mirror more accurately.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.