Planar mechanical resonator sensitive along an axis perpendicular to its plane
US6889550B2 · kind B2 · utility
20Cited by
5References
17Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jan 29, 2002 |
| Grant date | May 10, 2005 |
| Priority date | — |
| Expiry date | Jan 29, 2022 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01C19/5684
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The invention concerns a mechanical resonator with a planar monolithic vibrating structure extending along a closed contour whereof the axis of sensitivity is substantially perpendicular to the plane of said structure. The invention is characterised in that the planar structure (1) is a regular convex polygon with 4k vertices (3) (k being the order of the vibrational mode implemented when the resonator is vibrated) and is suspended to a fixed base (4, 5) via n suspension arms (2) with substantially radial extension arranged substantially symmetrically.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.