Preparation of crosslinked particles from polymers having activatible crosslinking groups
US6890703B2 · kind B2 · utility
60Cited by
10References
8Claims
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Key dates
| Filing date | Mar 6, 2002 |
| Grant date | May 10, 2005 |
| Priority date | — |
| Expiry date | Jan 4, 2023 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/02282
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
Crosslinked particles are provided that are useful in the manufacture of dielectric materials for use in electronic devices such as integrated circuits. The crosslinked particles are prepared by activating crosslinkable groups on synthetic polymer molecules, where the crosslinkable groups are inert until activated and, when activated, undergo an irreversible intramolecular crosslinking reaction to form crosslinked particles.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.