Dielectric film
US6891155B2 · kind B2 · utility
1Cited by
15References
60Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 17, 2002 |
| Grant date | May 10, 2005 |
| Priority date | — |
| Expiry date | Sep 17, 2022 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/02282
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A dielectric film is provided which includes a base layer and a capping layer, preferably silicon oxynitride, wherein the film is an effective moisture and ion barrier when disposed between a conductive substrate and a liquid having an electrical potential different than the electrical potential of the substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.