Photodetector matrix with pixels isolated by walls, hybridized onto a reading circuit

US6891242B2 · kind B2 · utility

Assignee

• COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES · FR

Inventors

• Pierre Gidon · Échirolles, FR
• Philippe Pantigny · Le Pont-de-Claix, FR

Key dates

• Filing date: Apr 10, 2003
• Grant date: May 10, 2005
• Expiry date: Apr 10, 2023

Classification

• Technology area (CPC H): Electricity
• CPC primary: H10F77/93

Abstract

An array of photodetectors intended to be hybridized on a readout circuit and fabricated from a wafer in semiconductor material. The wafer is divided into pixels, the pixels being separated from one another by walls formed crosswise over the entire thickness of the wafer, the hybridization surface having connection pads enabling hybridization of the photodetector array to the readout circuit.