Driving apparatus, exposure apparatus, and device manufacturing method
US6891597B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Apr 17, 2003 |
| Grant date | May 10, 2005 |
| Priority date | — |
| Expiry date | Apr 17, 2023 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/70758
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A driving apparatus which drives an object along a guide surface in X and Y directions. The apparatus includes a first actuator which drives the object in the X direction, a second actuator which drives the object in the Y direction, and a controller which controls the first and second actuators. The first and second actuators each have a reaction force counter which moves upon receipt of a reaction force generated in driving the object. In moving the object standing at a first position to a second position and stopping the object, the controller controls the first and second actuators such that acceleration periods of the two coincide and deceleration periods of the two coincide. Also, the object moves on a straight line connecting the first position and the second position.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.