High resolution, dynamic positioning mechanism for specimen inspection and processing
US6891601B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 14, 2004 |
| Grant date | May 10, 2005 |
| Priority date | — |
| Expiry date | Jul 14, 2024 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/70716
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A specimen positioning mechanism (10) includes a movable stage (12) movable along multiple axes, a plate (35) connected to and supporting a specimen mounting chuck (14), multiple linear displacement mechanisms (36, 38) coupling the plate to the movable stage and mutually spaced apart at different locations between the movable stage and the plate and separately controllable to change distances between the movable stage and the plate, and a flexible member (22) coupling the movable stage and the plate. The flexible member is motion compliant in three axes of motion. The flexible member in response to linear displacements of the linear displacement mechanisms allows linear and rotational movement of the specimen mounting chuck in the three axes of motion compliance.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.