Patent · US Expired

Chip mounting device

US6892447B1 · kind B1 · utility

8Cited by
5References
31Claims
0Family size

Assignee

Inventors

Key dates

Filing dateNov 14, 2000
Grant dateMay 17, 2005
Priority date
Expiry dateDec 5, 2020

Classification

  • Technology area (CPC Y)Emerging Cross-Sectional Technologies
  • CPC primaryY10T29/53178
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

A method accurately calibrating a movement control system of mark recognition in a chip mounting device, comprising the steps of: recognizing a first recognition mark put on a head (2) and a second recognition mark (13) put on a stage (26) with two-field recognition means (7) so as to calibrate and update the preceding control parameters inputted into the movement control system of the two-field recognition means (7); and, with the head (2) lowered to position the first recognition mark closely to the second recognition mark (13), recognizing both marks with third recognition means (20) when the two-field recognition means (7) is moved back so as to calibrate and update the preceding control parameters inputted into the movement control system of the two-field recognition means (7).

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.