Large area orientation of block copolymer microdomains in thin films
US6893705B2 · kind B2 · utility
47Cited by
5References
38Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 28, 2002 |
| Grant date | May 17, 2005 |
| Priority date | — |
| Expiry date | May 28, 2022 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/31
- WIPO fieldMacromolecular chemistry, polymers
- WIPO sectorChemistry
Abstract
A method and apparatus for orientation of block copolymer microdomains via rapid solidification. Rapid solidification from a solvent may include directional solidification and/or epitaxy to form patterns of microdomains in a film of block copolymer. Microdomains may include various structures formed by components of a block copolymer, such as vertical lamellae, in-plane cylinders, and vertical cylinders, and may depend on film thickness. Orientation of structures in microdomains may be controlled to be approximately uniform, and spatial arrangement of microdomains may be controlled.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.