Patent · US Expired

Manipulator for an optical or particle-optical apparatus

US6894288B2 · kind B2 · utility

1Cited by

13References

27Claims

0Family size

Assignee

LEO Elektronenmikroskopie GmbH · DE

Inventors

Helmut Muller · Schwäbisch Gmünd, DE
Daniel Tobias · Oberkochen, DE

Key dates

Filing date	Mar 24, 2003
Grant date	May 17, 2005
Priority date	—
Expiry date	Mar 24, 2023

Classification

Technology area (CPC H)Electricity
CPC primaryH01J37/261
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

The invention is directed to a manipulator for an optical apparatus including a particle-optical apparatus. The manipulator is especially a diaphragm or specimen manipulator in an electron microscope. The component (4), which is to manipulated, is accommodated by a transfer body (2) movable relative to a spatially-fixed component (1) and the transfer body (2) includes a composite material having a high thermal conductivity while simultaneously having a vanishing or negative thermal expansion coefficient in the direction of the connecting axis (B—B) between the component (4) and the spatially-fixed component (1).

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.