Multipoint plane measurement probe and methods of characterization and manufacturing using same
US6894513B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 27, 2003 |
| Grant date | May 17, 2005 |
| Priority date | — |
| Expiry date | Jan 29, 2023 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R1/07314
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The present application describes a method and an apparatus for characterizing a conductive plane using multipoint measurement. In an embodiment of the present invention, a known current is injected in the conductive plane using multipoint probes and voltage is measured using multipoint probes. The electrical characteristics of the plane can be determined using the values of the known current, measured voltage and the distance between the probes. In an embodiment of the present invention, the conductive plane is integrated in a semiconductor package of an integrated circuit and the value of the known current is determined based on the actual current that can be provided by the integrated circuit during normal operation.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.