Patent · US Expired

Sub-wavelength structures for reduction of reflective properties

US6897469B2 · kind B2 · utility

14Cited by
3References
7Claims
0Family size

Inventors

Key dates

Filing dateMay 2, 2003
Grant dateMay 24, 2005
Priority date
Expiry dateJul 17, 2023

Classification

  • Technology area (CPC B)Performing Operations; Transporting
  • CPC primaryB81B7/00
  • WIPO fieldMicro-structural and nano-technology
  • WIPO sectorChemistry

Abstract

A method for manufacturing optically-transparent lids includes etching sub-wavelength structures on a surface of a lid wafer. The structures may be arrayed in a hexagonally closed-packed pattern.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.