Sub-wavelength structures for reduction of reflective properties
US6897469B2 · kind B2 · utility
14Cited by
3References
7Claims
0Family size
Inventors
Key dates
| Filing date | May 2, 2003 |
| Grant date | May 24, 2005 |
| Priority date | — |
| Expiry date | Jul 17, 2023 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81B7/00
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
A method for manufacturing optically-transparent lids includes etching sub-wavelength structures on a surface of a lid wafer. The structures may be arrayed in a hexagonally closed-packed pattern.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.