Micro-electro-mechanical system (MEMS) variable capacitor apparatuses and related methods
US6897537B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Jun 13, 2003 |
| Grant date | May 24, 2005 |
| Priority date | — |
| Expiry date | Jun 13, 2023 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01G5/18
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
Micro-Electro-Mechanical System (MEMS) Variable Capacitor Apparatus and Related Methods. According to one embodiment, a MEMS variable capacitor is provided. The variable capacitor can include first and second electrodes being spaced apart, and at least one of the electrodes being movable when a voltage is applied across the first and second electrodes. The variable capacitor can also include a first conductive plate attached to and electrically isolated from the first electrode. Furthermore, the variable capacitor can include a second conductive plate attached to the second electrode and spaced from the first conductive plate for movement of at least one of the plates with respect to the other plate upon application of voltage across the first and second electrodes to change the capacitance between the first and second plates.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.