Patent · US Expired

Flow sensor element and method of using same

US6898969B2 · kind B2 · utility

1Cited by

2References

31Claims

0Family size

Assignee

Heraeus Sensor Technology GmbH · DE

Inventors

Karl-Heinz Wienand · Aschaffenburg, DE
Karlheinz Ullrich · Groß-Umstadt, DE
Matthias Muziol · Seligenstadt, DE

Key dates

Filing date	Dec 19, 2003
Grant date	May 31, 2005
Priority date	—
Expiry date	Dec 19, 2023

Classification

Technology area (CPC G)Physics
CPC primaryG01F1/692
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A flow sensor element is provided having at least one temperature-measuring element and at least one heating element each having at least one platinum thin film resistor, the at least one temperature-measuring element and the at least one heating element each being arranged on a carrier element which is formed from a ceramic foil laminate or a multi-part ceramic component. The carrier elements have electrical conductor paths and junction surfaces for electrically contacting the at least one temperature-measuring element and the at least one heating element. The at least one temperature-measuring element and the at least one heating element each have a metallic carrier foil with an electrically insulating coating, on which the platinum thin film resistors are arranged. The flow sensor element may be used for mass through-flow measurements of gaseous or liquid media in pipe ducts, for example in an exhaust gas pipe of an internal combustion engine.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.