Micromechanical speed sensor

US6898972B2 · kind B2 · utility

Assignee

• EADS Deutschland GmbH · DE

Inventors

• Karin Bauer · Oberhaching, DE
• Tanjo Gleissner · Munich, DE
• Konrad Lentner · Mintraching, DE
• Stefan Sassen · Munich, DE
• Josef Schalk · Riedlingen, DE
• Ralf Voss · Starnberg, DE

Key dates

• Filing date: Aug 6, 2001
• Grant date: May 31, 2005
• Expiry date: Aug 6, 2021

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y10T29/49007
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A micromechanical rotation speed sensor with a gimbals-mounted structure capable of vibration includes two vibration elements (4, 5) which are swivelled about two axes (A, B) oriented perpendicular toward each other. An excitation unit in the form of an electrode (7) sets the first vibration element (4) into a vibration about the first axis of rotation (A). A read out unit in the form of a read out electrode (8) records a tipping or vibration of the second vibration element (5) about the second axis of rotation (B) as a measure for the rotation speed of the sensor. Additional mass elements (6a, 6b) which are symmetrically aligned are situated on the upper side (2a) and the underside (2b) of the first vibration element (4) which form a rocker. The sensor is manufactured of at least three individually processed wafers which are finally joined together and form a top part (1), a midsection (2) and a bottom part (3).