Apparatus and method for correcting errors generated by a laser with non-ideal tuning characteristics
US6900897B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Apr 1, 2004 |
| Grant date | May 31, 2005 |
| Priority date | — |
| Expiry date | Apr 1, 2024 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01M11/331
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The present invention is an apparatus and method for correcting errors generated by a laser with non-ideal tuning characteristics, the apparatus comprises a laser having non-ideal tuning characteristics. At least three interferometers are positioned in an operable relationship to the laser, wherein a sampling interferometer and at least one auxiliary interferometer correct for residual errors resulting from the laser; and wherein a measurement interferometer makes a measurement. A signal acquisition system is positioned in an operable relationship to each interferometer and a processor is positioned in an operable relationship to the signal acquisition system.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.