Method and apparatus using a closed loop controlled actuator for surface profilometry

US6901677B2 · kind B2 · utility

Assignee

• The University Of North Carolina At Charlotte · US

Inventors

• Stuart T. Smith · Charlotte, US
• Marcin B. Bauza · Charlotte, US
• Pavan Jain · Pikesville, US
• Shane Woody · Charlotte, US

Key dates

• Filing date: May 5, 2004
• Grant date: Jun 7, 2005
• Expiry date: May 5, 2024

Classification

• Technology area (CPC G): Physics
• CPC primary: G01B5/0002
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

An apparatus for profiling the surface of a workpiece, including a probe adapted to make contact with the surface of a workpiece, a sensor for determining or deriving the force between the probe and the workpiece surface, an actuator that adjusts the position of the probe along an axis, which is generally perpendicular to the surface of the workpiece, in order to maintain a constant force between the probe and the surface, and a closed control loop, including a controller that controls the operation of the actuator based on information from the sensor.