Method and apparatus for providing a uniform coating thickness along an axial direction within a substrate tube
US6901775B2 · kind B2 · utility
2Cited by
23References
15Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 21, 2001 |
| Grant date | Jun 7, 2005 |
| Priority date | — |
| Expiry date | Nov 29, 2022 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC03B37/0183
- WIPO fieldOther special machines
- WIPO sectorMechanical engineering
Abstract
A method and apparatus for providing a uniform coating thickness along an axial direction within an internal portion of a substrate tube is disclosed. A gas delivery unit is configured to coat the internal portion of the substrate tube. The gas delivery unit includes an insert. At least one of an inner diameter of the insert, a length of the insert, a gap between the insert and the substrate tube, and a flow of the gas mixture delivered to the substrate tube is configured to provide the uniform coating thickness along the axial direction.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.