Piezoelectric resonator, piezoelectric resonator component and method of making the same
US6903489B2 · kind B2 · utility
6Cited by
8References
28Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 25, 2001 |
| Grant date | Jun 7, 2005 |
| Priority date | — |
| Expiry date | Aug 5, 2022 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H9/177
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
A first vibrating electrode is provided on a first side of a piezoelectric substrate perpendicular to the thickness direction. A second vibrating electrode is provided on a second side opposite to the first side to face the first vibrating electrode. A first pad and a second pad are respectively formed on a side of the piezoelectric substrate perpendicular to the thickness direction in area having a small vibration displacement. The first pad and the second pad are electrically connected to the first vibrating electrode and the second vibrating electrode.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.