Piezoelectric filter and electronic component including the same
US6903496B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 29, 2003 |
| Grant date | Jun 7, 2005 |
| Priority date | — |
| Expiry date | May 29, 2023 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H9/568
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
A piezoelectric filter includes a piezoelectric thin film disposed on a silicon substrate, and a plurality of piezoelectric resonators each having electrodes facing each other with the piezoelectric thin film sandwiched therebetween, and each of the plurality of piezoelectric resonators has a filtering function. The electrode material of one of the piezoelectric resonators is different from the electrode material of the other piezoelectric resonators. For example, the former electrode material has a higher stiffness than the latter electrode material. The piezoelectric filter achieves high-Q resonance and improves the attenuation characteristic.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.