System and method for ECM land erosion metrology
US6904790B2 · kind B2 · utility
0Cited by
5References
11Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 18, 2003 |
| Grant date | Jun 14, 2005 |
| Priority date | — |
| Expiry date | Jun 18, 2023 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B5/28
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A system and method for characterizing and measuring hydrodynamic grooves made by ECM processes is disclosed. The method includes a procedure for alignment of the work piece to the measurement apparatus as well as a technique for accurately reliably measuring the erosion pattern quickly. Additionally, the invention provides a system for characterizing and measuring the erosion of these grooves.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.