Indium or tin bonded megasonic transducer systems
US6904921B2 · kind B2 · utility
9Cited by
39References
23Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 27, 2002 |
| Grant date | Jun 14, 2005 |
| Priority date | — |
| Expiry date | Jul 20, 2023 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S134/902
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
A megasonic cleaning system comprised of a container, a resonator, one or more piezoelectric crystals and a bonding layer comprised of indium or tin for attaching the piezoelectric crystal to the resonator. The resonator comprises a material selected from the group consisting of quartz, sapphire, silicon carbide, silicon nitride, aluminum, ceramics and stainless steel. The piezoelectric crystal may be attached directly to a side or to the bottom of the container, in which case the container acts as the resonator.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.