Method and system for producing silane
US6905576B1 · kind B1 · utility
11Cited by
31References
12Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 14, 1999 |
| Grant date | Jun 14, 2005 |
| Priority date | — |
| Expiry date | Dec 14, 2019 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S203/06
- WIPO fieldMaterials, metallurgy
- WIPO sectorChemistry
Abstract
This invention relates to a continuous process for the preparation of silane by catalytic disproportionation of trichlorosilane in a reactive/distillative reaction zone having a catalyst bed of catalytically active solid.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.