Modification of selectivity for sensing for nanostructure device arrays
US6905655B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 14, 2003 |
| Grant date | Jun 14, 2005 |
| Priority date | — |
| Expiry date | Mar 14, 2023 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T436/11
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An electronic system for selectively detecting and identifying a plurality of chemical species, which comprises an array of nanostructure sensing devices, is disclosed. Within the array, there are at least two different selectivities for sensing among the nanostructure sensing devices. Methods for fabricating the electronic system are also disclosed. The methods involve modifiying nanostructures within the devices to have different selectivity for sensing chemical species. Modification can involve chemical, electrochemical, and self-limiting point defect reactions. Reactants for these reactions can be supplied using a bath method or a chemical jet method. Methods for using the arrays of nanostructure sensing devices to detect and identify a plurality of chemical species are also provided. The methods involve comparing signals from nanostructure sensing devices that have not been exposed to the chemical species of interest with signals from nanostructure sensing devices that have been exposed to the chemical species of interest. Nanostructure sensing device array structures that can measure and subtract out environmental factors are also disclosed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.